Umicore joined AVS 20th International Conference on Atomic Layer Deposition (ALD 2020)
Umicore PMC joined AVS 20th International Conference on Atomic Layer Deposition (ALD 2020) featuring the 7th International Atomic Layer Etching Workshop (ALE 2020), which was adapted into a Virtual Meeting comprised of Live and On Demand Sessions, from June 29th till July 1st.
We introduced during ALD2020 poster session our developments of new hydrazine based precursors for semiconductor fabrication. This new class of precursors leads to metal depositions that are virtually free of carbon and oxygen, known as critical sources of impurities in CVD/ALD processes.
Please check our poster and feel free to contact us for more information.