Materials for Advanced Metallization (MAM 2017)

Starting with refractory metals and silicides in the 80's, moving to materials for advanced metallization in 1995, the MAM addresses new and challenging topics in the field of BEOL solutions, novelties in alternative interconnect systems and more widely advanced materials and structures relevant to micro and nano-electronics. Topics include both fundamental and applied research, as well as issues related to introduction into manufacturing.  The conference also aims to address new challenges in the fields of materials for flexible electronics, nanodevices and process and device modelling and simulation.
This year the main topics are:

• Materials, processes & integration
• Deposition PVD; CVD; ALD; ELD; ECD; SAMs, reflow; e-beam
• Advanced characterization and modeling techniques
• Applications including nanoscale

For more information, please click here.