Joint EuroCVD 21 – Baltic ALD 15 Conference

For the first time, the European Conferences Euro CVD and BalticALD will be organized together.

The topics include:

• Precursors (design, synthesis and delivery)
• Modelling (surface, gas phase, thermo chemistry, quantum chemistry, multi scale)
• Process Equipment (reactors)
• Energy Enhanced processes (Plasma, Hot wire, Photon)
• Nanomaterials (particles, 2D-materials, nano structures)
• In-situ monitoring (QCM, Ellipsometry, IR, syncrotron)
• Oxides (TCO, high-k, hard coatings, thermal barriers)
• Nitrides (semiconductors, conductors, hard coatings)
• Carbides (hard coatings, semiconductors)
• Elemental films (metals, amorphous carbon)
• Emerging materials (hybrid MLD/ALD, sulfides

For more information, please click here.